- Degree
- Master of Science
- Course location
- Ilmenau
- Teaching language
- • English
- Languages
- The main teaching language is English. Some elective subjects may be offered in German.
A German language course is compulsory (part of the curriculum) for students who do not have any German language proficiency.
- Programme duration
- 4 semesters
- Beginning
- Winter semester
- Application deadline
- Application period for students with certificates from non-EU/EEA countries: 16 January – 15 May
Application period for students with certificates from EU/EEA countries, Switzerland, or the UK: 16 April – 15 September
Foreign applicants who need to apply for a visa to enter Germany should submit their visa application at least three months before the course begins in October.
- Tuition fees per semester in EUR
- None
- Combined Master's degree / PhD programme
- No
- Joint degree / double degree programme
- No
- Description/content
- Studying microtechnologies and nanotechnologies at the TU Ilmenau offers a combination of classical microtechnologies and modern nanotechnologies. It covers methods, tools, and theoretical considerations for research and development in the world of microscale and nanoscale structures.
The aim of this engineering science-oriented interdisciplinary Master's programme is to teach the scientific fundamentals and basic technical knowledge about microstructure and nanostructure generation as well as their systemic integration in systems. Students acquire skills to contribute and drive future developments in microtechnologies and nanotechnologies as well as nanotechnical applications.
Particular attention is devoted to teaching the relevant methodological variety of lithographic nanostructuring techniques (top-down strategy), the molecular structuring through self-assembly (bottom-up approach), the opportunity of combining both concepts, and the required characterisation techniques.
The programme comprises the following foci:
• Nanotechnology, nanoelectronics, and nanosensors
• Materials for microtechnologies and nanotechnologies
• Technologies of microstructuring and nanostructuring
• Structure and material characterisation
• Semiconductors
• Microsystems technology / system integration
• Microelectronic packaging and assembly
Under the principle of unity of research and teaching, this interdisciplinary programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Centre of Micro- and Nanotechnologies. Students will be involved in research projects from an early stage. They have the opportunity to gain hands-on experience in the modern laboratory space (used as clean rooms in different classes) available in two technology buildings.